Optic Metrology Systems

IM-8001

Controller

1" 20-megapixel monochrome CMOS

12.1" LCD monitor (WXGA: 1280 × 800)

Double telecentric lens

±0.5 μm, ±1 μm, ±2 μm *4, ±3.9 μm *1, 0.1 μm, IM-8005: —IM-8020: ±(4 + 0.02 L) μm *5IM-8030: ±(4 + 0.02 L) μm *6, IM-8005: —IM-8020: ±(7 + 0.02 L) μm *2IM-8030: ±(7 + 0.02 L) μm *3, IM-8005: —IM-8020: ±1.5 μmIM-8030: ±1.5 μm, IM-8005: —IM-8020: ±2 μmIM-8030: ±2 μm, IM-8005: ±(1.4 + 0.04 D) μm *10IM-8020: ±(1.4 + 0.04 D) μm *11IM-8030: ±(1.4 + 0.04 D) μm *12, IM-8005: ±(2.8 + 0.02 D) μm *7IM-8020: ±(2.8 + 0.02 D) μm *8IM-8030: ±(2.8 + 0.02 D) μm *9, IM-8005: 25 × 25 mm 0.98" × 0.98"IM-8020: 125 × 125 mm 4.92" × 4.92"IM-8030: 225 × 125 mm 8.86" × 4.92", IM-8005: ø100 mm ø3.94"IM-8020: 200 × 200 mm 7.87" × 7.87" (4× R50 R1.97")IM-8030: 300 × 200 mm 11.81" × 7.87" (4× R50 R1.97")

IM-8005: —IM-8020: ±(8 + 0.02 L) μm *14IM-8030: ±(8 + 0.02 L) μm *15, IM-8005: —IM-8020: ±2 μm *13IM-8030: ±2 μm *13, IM-8005: —IM-8020: 0.015 NIM-8030: 0.015 N, IM-8005: —IM-8020: 30 mm 1.18"IM-8030: 30 mm 1.18", IM-8005: —IM-8020: 90 × 90 mm 3.54" × 3.54"IM-8030: 190 × 90 mm 7.48" × 3.54", IM-8005: —IM-8020: ø3 mm ø0.12"IM-8030: ø3 mm ø0.12"

IM-8005

Head

1" 20-megapixel monochrome CMOS

12.1" LCD monitor (WXGA: 1280 × 800)

Double telecentric lens

±0.5 μm, ±1 μm, ±3.9 μm *1, 0.1 μm, —, ±(1.4 + 0.04 D) μm *4, ±(2.8 + 0.02 D) μm *3, ±2 μm *2, 25 × 25 mm 0.98" × 0.98", ø100 mm ø3.94"

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IM-8010

Head

1" 20 megapixel monochrome CMOS

12.1" LCD monitor (WXGA: 1280 x 800)

Double telecentric lens

±(1.4+0.04D) µm*6, ±(2.8+0.02D) µm*5, ±(4+0.02L) µm*4, ±(7+0.02L) µm*2, ±0.5 µm, ±1 µm, ±1.5 µm, ±2 µm, ±2µm*3, ±3.9 µm*1, 0.1 µm, 125 mm×125 mm, 200 mm × 200 mm (quadangle R50)

Non-voltage input (contact/solid-state)

IM-8020

Head

1" 20-megapixel monochrome CMOS

12.1" LCD monitor (WXGA: 1280 × 800)

Double telecentric lens

±0.5 μm, ±1 μm, ±3.9 μm *1, 0.1 μm, ±(1.4 + 0.04 D) μm *6, ±(2.8 + 0.02 D) μm *5, ±(4 + 0.02 L) μm *4, ±(7 + 0.02 L) μm *2, ±1.5 μm, ±2 μm, ±2 μm *3, 125 × 125 mm 4.92" × 4.92", 200 × 200 mm 7.87" × 7.87" (4× R50 R1.97")

±(8 + 0.02 L) μm *8, ±2 μm *7, 0.015 N, 30 mm 1.18", 90 × 90 mm 3.54" × 3.54", ø3 mm ø0.12"

IM-8030

Head

1" 20-megapixel monochrome CMOS

12.1" LCD monitor (WXGA: 1280 × 800)

Double telecentric lens

±0.5 μm, ±1 μm, ±3.9 μm *1, 0.1 μm, ±(1.4 + 0.04 D) μm *6, ±(2.8 + 0.02 D) μm *5, ±(4 + 0.02 L) μm *4, ±(7 + 0.02 L) μm *2, ±1.5 μm, ±2 μm, ±2 μm *3, 225 × 125 mm 8.86" × 4.92", 300 × 200 mm 11.81" × 7.87" (4× R50 R1.97")

±(8 + 0.02 L) μm *8, ±2 μm *7, 0.015 N, 190 × 90 mm 7.48" × 3.54", 30 mm 1.18", ø3 mm ø0.12"

IM-8030T

Head

1" 20-megapixel monochrome CMOS

12.1" LCD monitor (WXGA: 1280 × 800)

Double telecentric lens

±0.5 μm, ±1 μm, ±3.9 μm *1, 0.1 μm, ±(1.4 + 0.04 D) μm *6, ±(2.8 + 0.02 D) μm *5, ±(4 + 0.02 L) μm *4, ±(7 + 0.02 L) μm *2, ±1.5 μm, ±2 μm, ±2 μm *3, 225 × 125 mm 8.86" × 4.92", 300 × 200 mm 11.81" × 7.87" (4× R50 R1.97")

±(8 + 0.02 L) μm *8, ±2 μm *7, 0.015 N, 190 × 90 mm 7.48" × 3.54", 30 mm 1.18", ø3 mm ø0.12"

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IM-SG2

Tempered stage glass

IM-7010, IM-7020

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OP-88179

Stage glass

One of these is included with the purchase of the IM-7020 or 7010.

IM-7010, IM-7020

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OP-88185

Fixture sheet

This Sheet is for fixing the object by sticking on the stage glass of the IM-7000 Series.

10 pieces

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IM-7001

Controller

1” 6.6 mega pixel monochrome CMOS

10. 4” LCD monitor (XGA: 1024 × 768)

Double telecentric lens

0.1 µm, Wide-field measurement mode : ±1 µm High-precision measurement mode : ±0.5 µm, Wide-field measurement mode : ±2 µm High-precision measurement mode : ±1.5 µm, Wide-field measurement mode : 200 mm x 200 mm 7.87 × 7.87" (4x R50)High-precision measurement mode ： 125 × 125 mm 4.92 × 4.92", Wide-field measurement mode :±(7+0.02 L) µm*3High-precision measurement mode :±(4+0.02L) µm*4, Wide-field measurement mode :±5 µm *1High-precision measurement mode :±2 µm*2

±(8+0.02 L)µm*6, ±2 µm*5, 0.015 N, 30 mm 1.18", 90 × 90 mm 3.54 × 3.54", ø3 mm ø0.12"

IM-7501

Controller

1” 6.6 mega pixel monochrome CMOS

10. 4” LCD monitor (XGA: 1024 × 768)

Double telecentric lens

0.1 µm, [IM-7010] 125 × 125 mm 4.92" × 4.92"[IM-7020] 125 × 125 mm 4.92" × 4.92"[IM-7030] 225 × 125 mm 8.86" × 4.92", [IM-7010] 200 mm × 200 mm 7.87" × 7.87" (4× R50)[IM-7020] 200 mm × 200 mm 7.87" × 7.87" (4× R50)[IM-7030] 300 mm × 200 mm 11.81" × 7.87" (4× R50), [IM-7010/IM-7020] ±(4 + 0.02 L) µm*5[IM-7030] ± (4 + 0.02 L) µm*6, [IM-7010/IM-7020] ±(7 + 0.02 L) µm*2[IM-7030] ±(7 + 0.02 L) µm*3, ±0.5 µm, ±1 µm, ±1.5 µm, ±2 µm, ±2 µm*4, ±5 µm*1

[IM-7010] -[IM-7020] ±(8 + 0.02 L) µm*8[IM-7030] ±(8 + 0.02 L) µm*9, [IM-7010] -[IM-7020] ±2 µm*7[IM-7030] ±2 µm*7, [IM-7010] -[IM-7020] 0.015 N[IM-7030] 0.015 N, [IM-7010] -[IM-7020] 30 mm 1.18"[IM-7030] 30 mm 1.18", [IM-7010] -[IM-7020] 90 × 90 mm 3.54" × 3.54"[IM-7030] 190 × 90 mm 7.48" × 3.54", [IM-7010] -[IM-7020] ø3 mm[IM-7030] ø3 mm

IM-7010

HeadModel incorporating backlighting/fixed ring-illumination unit

1” 6.6 mega pixel monochrome CMOS

10. 4” LCD monitor (XGA: 1024 × 768)

Double telecentric lens

0.1 µm, Wide-field measurement mode : 200 mm x 200 mm 7.87 × 7.87" (4x R50)High-precision measurement mode : 125 × 125 mm 4.92 × 4.92", Wide-field measurement mode: ± (7+0.02 L) µm*3High-precision measurement mode: ± (4+0.02L) µm*4, Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm, Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm, Wide-field measurement mode: ±5 µm *1High-precision measurement mode: ±2 µm*2

Non-voltage input (with and without contact)

IM-7020

HeadModel incorporating backlighting/programmablering-illumination unit/light probe unit

1” 6.6 mega pixel monochrome CMOS

10. 4” LCD monitor (XGA: 1024 × 768)

Double telecentric lens

0.1 µm, Wide-field measurement mode: ± (7+0.02 L) µm*3High-precision measurement mode: ± (4+0.02L) µm*4, Wide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm, Wide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm, Wide-field measurement mode: ±5 µm *1High-precision measurement mode: ±2 µm*2, Wide-field measurement mode: 200 mm × 200 mm 7.87 × 7.87" (4x R50)High-precision measurement mode: 125 × 125 mm 4.92 × 4.92"

±2 µm*5, 0.015 N, 30 mm 1.18", 90 × 90 mm 3.54 × 3.54", ø3 mm ø0.12", ± (8+0.02 L) µm*6

IM-7030

HeadWide stage model incorporating programmable ring-illumination/light probe unit

1” 6.6 mega pixel monochrome CMOS

10. 4” LCD monitor (XGA: 1024 × 768)

Double telecentric lens

0.1 µm, Wide-field measurement mode: ±(7 + 0.02 L) µm*3High-precision measurement mode: ± (4 + 0.02 L) µm*4, Wide-field measurement mode: ±1 µmHigh-precision measurement mode: ±0.5 µm, Wide-field measurement mode: ±2 µmHigh-precision measurement mode: ±1.5 µm, Wide-field measurement mode: ±5 µm*1High-precision measurement mode: ±2 µm*2, Wide-field measurement mode: 300 mm × 200 mm 11.81" × 7.87" (4× R50)High-precision measurement mode: 225 × 125 mm 8.86" × 4.92"

±(8 + 0.02 L) µm*6, ±2 µm*5, 0.015 N, 190 × 90 mm 7.48" × 3.54", 30 mm 1.18", ø3 mm

IM-7030T

HeadContact Height Measurement Unit

1” 6.6 mega pixel monochrome CMOS

10. 4” LCD monitor (XGA: 1024 × 768)

Double telecentric lens

0.1 µm, Wide-field measurement mode: ±(7 + 0.02 L) µm*3High-precision measurement mode: ± (4 + 0.02 L) µm*4, Wide-field measurement mode: ±1 µmHigh-precision measurement mode: ±0.5 µm, Wide-field measurement mode: ±2 µmHigh-precision measurement mode: ±1.5 µm, Wide-field measurement mode: ±5 µm*1High-precision measurement mode: ±2 µm*2, Wide-field measurement mode: 300 mm × 200 mm 11.81" × 7.87" (4× R50)High-precision measurement mode: 225 × 125 mm 8.86" × 4.92"

±(8 + 0.02 L) µm*6, ±2 µm*5, 0.015 N, 190 × 90 mm 7.48" × 3.54", 30 mm 1.18", ø3 mm

IM-DXW12N

Scan coaxial illumination

IM series

1

POM / Aluminum

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IM-H2C

Windows 7 Ultimate/Professional/Home Premium (64-bit version)Windows 8.1/Windows 8.1 Pro (64-bit version)Windows 10 Home/Pro/Enterprise (64-bit version)*1

2GHz or higher (Core i3 or higher)

4GB or more

5 GB or more

Display color: 32-bit or more

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IM-H2EA

Windows 7 Ultimate/Professional/Home Premium (64-bit version)Windows 8.1/Windows 8.1 Pro (64-bit version)Windows 10 Home/Pro/Enterprise (64-bit version)*1

2GHz or higher (Core i3 or higher)

4GB or more

5 GB or more

Display color: 32-bit or more

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